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MOCVD
Outline
MOCVD thin film process tool for dielectric materials
Features
  • Compact 6 high cost performance
  • Substrate can be heat up to 700 degreeC
Carbon Nano-tube Reactor
Outline
Laser abration reactor for Carbon Nano-Tube
ÅE MOCVD reactor of Superconducting wire
Outline
Multi Step MOCVD reactor for Oxide Superconducting wire

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